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Search for "low-angle ion scattering" in Full Text gives 1 result(s) in Beilstein Journal of Nanotechnology.

Scanning reflection ion microscopy in a helium ion microscope

Yuri V. Petrov and
Oleg F. Vyvenko

Beilstein J. Nanotechnol. 2015, 6, 1125–1137, doi:10.3762/bjnano.6.114

detectable step height was found to be approximately 5 nm. RIM imaging of an insulator surface without the need for charge compensation was successfully demonstrated. Keywords: helium ion microscope; low-angle ion scattering; reflection microscopy; surface imaging; surface morphology; Introduction

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Figure 1: Schematic of the detection of reflected ions in the helium ion microscope. 1 – sample, 2 – Pt-coate...

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Figure 2: Images of Au on carbon by detection of reflected He ions (a) and backscattered ions (b).

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Figure 3: Images of Au on carbon obtained by detection of secondary electrons (a) and reflected He ions (b).

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Figure 4: Images of silicon dioxide bars on silicon (TGQ-1 sample) obtained by detection of (a) secondary ele...

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Figure 5: (a) Signal profiles: secondary electrons (dashed line) and reflected ions (solid line), red arrows ...

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Figure 6: RIM image of cleaved mica. White arrows shows mark the smallest step in this image. Accelerating vo...

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Figure 7: A schematic diagram of the incident and reflected ion paths with designations given in the text.

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Figure 8: Dependence of the reflection coefficient of 35 keV He⁺ on the grazing angle calculated with SRIM so...

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Figure 9: Designation of the regions of the upward step (a), and their projection onto the image plane (b): 1...

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Figure 10: Ion transmission through the edge of a downward step (a) and its projection to the image plane (b).

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Figure 11: Dependence of the coefficients on the distance from the edge of the step: reflection coefficient fr...

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Figure 12: Profile of the relative contrast of a downward step: dots – experimental data, solid line – data ca...

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Figure 13: Reflection of ions from the charged surface. Trajectories of ions reflected from a charged surface ...

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Full Research Paper

Published 07 May 2015

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